Inventors:
Chris Schneller - Tijeras NM, US
Scott Roberts - Albuquerque NM, US
Kathryn Whitaker - Albuquerque NM, US
Kevin Ferguson - Albuquerque NM, US
Stephen Islas - Albuquerque NM, US
Joe Moore - Austin TX, US
Jim Puissant - Albuquerque NM, US
Assignee:
Poly-Flow Engineering, LLC - Albuquerque NM
International Classification:
B08B 9/00
Abstract:
Wafer carrier washing and drying apparatus and method, especially useful for the semiconducting industry.