Inventors:
A. Stuart Denholm - Lincoln MA
William A. Frutiger - Beverly MA
Kenneth E. Williams - Andover MA
Assignee:
Energy Sciences Inc. - Woburn MA
International Classification:
H01J 3700
Abstract:
This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.