Inventors:
Daniel J. Hoffman - Fort Collins CO, US
Daniel Carter - Fort Collins CO, US
Randy Grilley - Ault CO, US
Karen Peterson - Loveland CO, US
Assignee:
ADVANCED ENERGY INDUSTRIES, INC. - Fort Collins CO
International Classification:
H05H 1/46
Abstract:
Disclosed herein are systems, methods and apparatuses for dissociating a non-activated gas through a disc-shaped plasma in a remote plasma source. Two inductive elements, one on either side of the disc-shaped plasma, generate a magnetic field that induces electric fields that sustain the disc-shaped plasma. The inductive elements can be coiled conductors having any number of loops and can be arranged in planar or vertical coils or a combination of planar and vertical coils. Additionally, the ratio of inductive element radius to gap distance between the two inductive elements can be configured to achieve a desired vertical plasma confinement.