Inventors:
Benjamin Abbott - Longwood FL, US
Svetlana Malocha - Winter Springs FL, US
Jack Chocola - Lake Mary FL, US
Gary Monetti - Apopka FL, US
Joshua Zepess - Bend OR, US
International Classification:
H04R 17/00
US Classification:
029025350, 310324000, 333128000, 31031300R, 029592100
Abstract:
A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.