Inventors:
Joseph C. Robinson - Portland OR, US
International Classification:
B23K 15/00, G01Q 60/24, H01J 37/26
US Classification:
850 33, 250307, 21912168, 21912169
Abstract:
Systems and methods for preparing solid samples for analysis, such as microscopic examination in cross section or planimetric orientation. The sample preparation systems may include a sample support configured to secure a solid sample, an excitation beam source that generates an excitation beam configured to remove material from a surface of the sample, a beam shield configured to at least partially protect the sample from the excitation beam, and a beam shield holder configured to secure the beam shield, where the adjustment of the relative positions of the beam shield and sample holder permits the excitation beam to selectively expose a series of substantially planar surfaces of the sample.