Inventors:
Joseph P. Lorenzo - Stow MA
Richard A. Soref - Newton MA
Assignee:
The United States of America as represented by the Secretary of the Air
Force - Washington DC
International Classification:
G02P 610
Abstract:
The invention comprises processes and heterostructure products defining silicon on insulator waveguides (80, 88, 90, 106, 112, 120, 122) that are suitable for use with light in the 1. 3, 1. 6. mu. m or greater wavelengths. Silicon is deposited on an insulator layer 12 on a crystalline substrate 10 and grown or regrown in crystalline form. The silicon is then etched or formed into a waveguide structures.