Inventors:
Joseph Roberts - Longmont CO
Assignee:
PTS Corporation - San Jose CA
International Classification:
B23Q 125
Abstract:
A method and article are provided for batch processing of a plurality of MEMS dice. The MEMS dice are secured in a holder having multiple stations adapted to secure a MEMS die. A process step is then performed on the plurality of MEMS dice while they are secured in the holder and may be performed simultaneously on all of the MEMS dice secured in the holder.