Inventors:
Francis J. Kub - Arnold MD
Victor Temple - Clifton Park NY
Karl Hobart - Upper Marlboro MD
John Neilson - Norristown PA
Assignee:
Intersil Corporation - Palm Bay FL
International Classification:
H01L 2130, H01L 2146, H01L 2144, H01L 2148, H01L 2150
Abstract:
A method for making at least one semiconductor power device with current conduction in a vertical direction from a plurality of semiconductor substrates includes processing at least one surface of each of two semiconductor substrates to form at least one of a metal layer and a doped region. The substrates are bonded together so that the at least one processed surface of each of the two semiconductor substrates define outer surfaces of the semiconductor device. The method further includes annealing the bonded together substrates at an anneal temperature so as to not adversely effect the processed surfaces. The method allows the making of a double sided semiconductor power device with a reduction in the number of sequential processing steps. The direct bonding approach allows current production recipes for fabricating single sided power devices to be used without requiring a separate process sequence.