Inventors:
John Herbert Heiss - Bethlehem PA
John Robert Wylie - North Andover MA
Assignee:
Bell Telephone Laboratories, Incorporated - Murray Hill NJ
Western Electric Company Inc. - New York NY
International Classification:
H01L 2330
Abstract:
Disclosed is a method of removing silicone rubber encapsulating material from micro-electronic circuits. The encapsulant is broken down molecularly and removed by a solution of tetramethyl-ammonium hydroxide which is diluted with an alcohol such as 2-propanol. It was found that this stripping solution causes minimal swelling of the encapsulant and leaves no significant residue which cannot be removed by standard rinsing.