MR. JOHN MCCOLLUM
Medical Practice at Broadway St, Portland, OR
License number
Oregon 7727
Category
Medical Practice
Type
Specialist
Address
Address
4259 NE Broadway St, Portland, OR 97213
Phone
(503) 358-3506
Professional information
Double Field Oxidation Process
US Patent:
4352236, Oct 5, 1982
Filed:
Jul 24, 1981
Appl. No.:
6/286578
Inventors:
John L. McCollum - Portland OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2122
US Classification:
29571
Abstract:
A process for growing field oxide particularly for a dynamic memory is described. The process results in thinner field oxides in the storage array (2000-3000 A) and thicker oxides for the peripheral circuits (7000-8000 A). The thinner field oxide regions have smaller bird-beaks, reducing required substrate area. The plate for the storage nodes are coupled to ground potential, thus the thinner field oxides in the storage region provide sufficient isolation.