Inventors:
John B. Hayes - Tucson AZ
Jamshid Jahanmir - Tucson AZ
Eric M. Frey - Tucson AZ
Assignee:
Wyko Corporation - Tucson AZ
International Classification:
G01N 2300
Abstract:
A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the outer piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Separate x, y, and z scan control voltage signals are applied to various quadrant conductors of the inner and outer piezoelectric tubes to control scanning of the free end of the inner tube in the x, y, and z directions, respectively.