Inventors:
Michael Adel - Zichron Ya'akov, IL
Mark Ghinovker - Migdal Haemek, IL
Elyakim Kassel - D.N. Misgav, IL
Boris Golovanevsky - Haifa, IL
John C. Robinson - Austin TX, US
Chris A. Mack - Austin TX, US
Jorge Poplawski - Haifa, IL
Pavel Izikson - Haifa, IL
Moshe Preil - Sunnyvale CA, US
Assignee:
KLA-Tencor Technologies Corporation - Milpitas CA
International Classification:
G06K 9/00
US Classification:
382151, 382145, 430 22, 430 30, 356399, 356401
Abstract:
An overlay method for determining the overlay error of a device structure formed during semiconductor processing is disclosed. The overlay method includes producing calibration data that contains overlay information relating the overlay error of a first target at a first location to the overlay error of a second target at a second location for a given set of process conditions. The overlay method also includes producing production data that contains overlay information associated with a production target formed with the device structure. The overlay method further includes correcting the overlay error of the production target based on the calibration data.