Inventors:
Steven George - Boulder CO, US
John Ferguson - Broomfield CO, US
Alan Weimer - Niwot CO, US
Christopher Wilson - Boulder CO, US
International Classification:
C30B028/12
Abstract:
Inorganic materials are deposited onto organic polymers using ALD methods. Ultrathin, conformal coatings of the inorganic materials can be made in this manner. The coated organic polymers can be used as barrier materials, as nanocomposites, as catalyst supports, in semiconductor applications, in coating applications as well as in other applications.