Inventors:
William John Boardman - Colorado Springs CO
John Crumlin - Colorado Springs CO
John Ralph Lindsey - Colorado Springs CO
Paul Thomas Carson - Colorado Springs CO
Judd Steven Carper - Colorado Springs CO
John Ames - Colorado Springs CO
Paul Elwin Stevenson - Colorado Springs CO
Assignee:
Ford Motor Company - Dearborn MI
International Classification:
G01P 15125
Abstract:
A protective coating is utilized to protect the silicon during a wet chemical etch step in the process of making a micromachine, thereby preventing the formation of etched holes or pits in the micromachine. In another embodiment, silicon sacrificial pedestals are used to eliminate or greatly reduces the electrical potential difference between metal on the glass substrate and the silicon, thereby eliminating arcing and the resulting damage to silicon and metal. These pedestals may be removed after the anodic bond.