Inventors:
Joel B. Jones - Bonham TX
Lawrence D. Dyer - Richardson TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
B24B 908
Abstract:
An apparatus and method of contouring the edge of a semiconductor wafer in a fiduciary mark notch utilizes a contouring wheel or burr having a smaller diameter than the diameter of the fiduciary mark notch.