Inventors:
Ravinder Aggarwal - Gilbert AZ, US
Jim Kusbel - Fountain Hills AZ, US
Jerry Davis - Phoenix AZ, US
Assignee:
ASM America, Inc. - Phoenix AZ
International Classification:
F16K031/44
Abstract:
A slit valve for a semiconductor processing apparatus, for fluidly sealing a passage connecting two chambers of the apparatus, such as a substrate reaction chamber and a region outside the reaction chamber. The slit valve comprises an actuator plate movable within a slot in one wall of the passage, the actuator plate and the slot oriented generally transverse to the passage. The actuator plate has a first position in which the valve is open, permitting the transfer of a substrate through the passage. The actuator plate also has a second position in which the valve is closed, and in which the actuator plate fluidly seals the passage such that fluid cannot flow through the passage across the actuator plate. A protective cover is configured to prevent debris within the passage (e. g. , broken wafers, shards, particulate contaminants, etc.