Inventors:
Marc Laverdiere - Wakefield MA, US
Robert F. McLoughlin - Pelham NH, US
George Gonnella - Pepperell MA, US
Iraj Gashgaee - Marlborough MA, US
Jennifer Marrs - Cornish NH, US
Assignee:
Entegris, Inc. - Chaska MN
International Classification:
F16K 31/12
Abstract:
A proportional fluid control valve with improved linearity and reduced hysteresis is disclosed. The valve allows for smooth, gentle flow of fluid in a substantially linear fashion, with minimal turns. Preferably the valve is pneumatically actuated. Where temperature is not an issue, the valve can be actuated by any suitable means, including stepper motors, linear motors, voice coils or other force actuators. A versatile molded valve body that requires fewer parts compared to a machined valve is disclosed. In one embodiment, the molded valve body is designed specifically for flow control and contains two sensor housings with carefully positioned flow paths to optimize the use of space. The sensor housing or housings can be separately formed as inserts, allowing installation in various orientations.