Inventors:
Jeffrey P. Bonn - Essex Junction VT, US
Brent A. Goplen - Underhill VT, US
Brian L. Kinsman - Essex Junction VT, US
Robert M. Rassel - Colchester VT, US
Edmund J. Sprogis - Williston VT, US
Daniel S. Vanslette - Fairfax VT, US
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION - Armonk NY
International Classification:
H01L 23/48, G06F 17/50
US Classification:
257774, 716119, 716100, 257E23011
Abstract:
Embodiments of the invention provide an integrated circuit (IC) having reduced through silicon via (TSV)-induced stresses and related IC design structures and methods. In one embodiment, the invention includes a method of designing an integrated circuit (IC) having reduced substrate stress, the method including: placing in an IC design file a plurality of through silicon via (TSV) placeholder cells, each placeholder cell having an undefined TSV orientation; replacing a first portion of the plurality of TSV placeholder cells with a first group of TSV cells having a first orientation; and replacing a second portion of the plurality of TSV placeholder cells with a second group of TSV cells having a second orientation substantially perpendicular to the first orientation, wherein TSV cells having the first orientation and TSV cells having the second orientation are interspersed to reduce a TSV-induced stress in an IC substrate.