JEFFREY F YOUNG, MD
Medical Practice at Cooper Ct, Los Gatos, CA
License number
California G64526
Category
Medical Practice
Type
Specialist
Address
Address
105A Cooper Ct, Los Gatos, CA 95032
Phone
(408) 884-2710
(408) 884-2734 (Fax)
(408) 884-2734 (Fax)
Organization information
See more information about JEFFREY F YOUNG at bizstanding.comJeffrey F Young MD
105A Cooper Ct, Los Gatos, CA 95032
Categories:
Medical Research & Development, Physicians & Surgeons
Site:
Phone:
(408) 399-5050 (Phone)
Professional information
Dr. Jeffrey F Young, Los Gatos CA - MD (Doctor of Medicine)
Specialties:
Anatomic & Clinical Pathology
Address:
Associated Pathology Med Grp
105A Cooper Ct, Los Gatos 95032
(408) 399-5050 (Phone)
105A Cooper Ct, Los Gatos 95032
(408) 399-5050 (Phone)
Certifications:
Anatomic & Clinical Pathology, 1993
Awards:
Healthgrades Honor Roll
Languages:
English
Education:
Medical School
University of California At San Diego
Graduated: 1987
University of California At San Francisco
Graduated: 1983
University of California At San Diego
Graduated: 1987
University of California At San Francisco
Graduated: 1983
Method And Apparatus For Forming A Borophosphosilicate Film
US Patent:
6345589, Feb 12, 2002
Filed:
Sep 4, 1998
Appl. No.:
09/148436
Inventors:
Chandrasekaram Ramiah - Phoenix AZ
Jeffrey L. Young - Los Gatos CA
Neil L. Pagel - Prescott AZ
Jeffrey L. Young - Los Gatos CA
Neil L. Pagel - Prescott AZ
Assignee:
Applied Materials, Inc. - Santa Clara CA
Motorola, Inc. - Scottsdale AZ
Motorola, Inc. - Scottsdale AZ
International Classification:
C23C 1600
US Classification:
118723E, 118723 R
Abstract:
A method and apparatus for improving film stability and moisture resistance of a borophosphosilicate film. The BPSG film according to the present invention is formed under plasma conditions in which high and low frequency RF power is employed to generate the plasma. The high frequency power supply provides most of the energy to break the molecules in the process gas thereby forming the plasma and promoting the necessary reactions. The low frequency power supply regulates and controls ion bombardment of the BPSG film as it is formed. In a preferred embodiment, nitrogen is included in the process gas and the low frequency RF power supply is used to precisely control ion bombardment during deposition processing thereby allowing incorporation of an unexpectedly elevated amount of nitrogen into the film further improving film stability.
Method And Apparatus For Forming A Borophosphosilicate Film
US Patent:
2002009, Jul 11, 2002
Filed:
Jan 9, 2002
Appl. No.:
10/043417
Inventors:
Chandrasekaram Ramiah - Phoenix AZ, US
Jeffrey Young - Los Gatos CA, US
Neil Pagel - Prescott AZ, US
Jeffrey Young - Los Gatos CA, US
Neil Pagel - Prescott AZ, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H05H001/24
US Classification:
427/569000
Abstract:
A method and apparatus for improving film stability and moisture resistance of a borophosphosilicate film. The BPSG film according to the present invention is formed under plasma conditions in which high and low frequency RF power is employed to generate the plasma. The high frequency power supply provides most of the energy to break the molecules in the process gas thereby forming the plasma and promoting the necessary reactions. The low frequency power supply regulates and controls ion bombardment of the BPSG film as it is formed. In a preferred embodiment, nitrogen is included in the process gas and the low frequency RF power supply is used to precisely control ion bombardment during deposition processing thereby allowing incorporation of an unexpectedly elevated amount of nitrogen into the film further improving film stability.