JASON THOMAS AUGUSTINO
Pilots at Wynn Cir, Livermore, CA
License number
California A4350807
Issued Date
Mar 2012
Expiration Date
Mar 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
988 Wynn Cir, Livermore, CA 94550
Professional information
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates
US Patent:
2013028, Oct 31, 2013
Filed:
Jun 21, 2013
Appl. No.:
13/923920
Inventors:
Jason Augustino - Livermore CA, US
International Classification:
H01L 21/268, C03B 20/00
US Classification:
438795, 2952501, 65 36
Abstract:
A quartz window with an interior plenum is operable as a shutter or UV filter in a degas chamber by supplying the plenum with an ozone-containing gas. Pressure in the plenum can be adjusted to block UV light transmission into the degas chamber or adjust transmittance of UV light through the window. When the plenum is evacuated, the plenum allows maximum transmission of UV light into the degas chamber.
Quartz Window For A Degas Chamber
US Patent:
8603292, Dec 10, 2013
Filed:
Oct 28, 2009
Appl. No.:
12/607659
Inventors:
Jason Augustino - Livermore CA, US
Tim Hart - Castro Valley CA, US
Tim Hart - Castro Valley CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
C23F 1/00, H01L 21/306
US Classification:
1563451, 1563453, 15634533, 15634534
Abstract:
A five-sided quartz window configured to be mounted on a degas chamber as a UV-transmissive window. The quartz window is made of synthetic quartz and has a uniform thickness. The shape of the quartz window is defined by an upper surface, a lower surface and a sidewall therebetween. The sidewall has five straight sections interconnected by five arcuate sections. The quartz window has four arcuate recesses extending into the sidewall.
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates
US Patent:
8492736, Jul 23, 2013
Filed:
Jun 9, 2010
Appl. No.:
12/797196
Inventors:
Jason Augustino - Livermore CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
H01L 21/465, B32B 17/00, C03B 23/20
US Classification:
250504R, 2504921, 2504922, 438727, 438795, 428 34, 428 344, 428 80, 362321, 134 30, 134 35, 134 37, 1341021, 134105
Abstract:
A quartz window with an interior plenum is operable as a shutter or UV filter in a degas chamber by supplying the plenum with an ozone-containing gas. Pressure in the plenum can be adjusted to block UV light transmission into the degas chamber or adjust transmittance of UV light through the window. When the plenum is evacuated, the plenum allows maximum transmission of UV light into the degas chamber.