JAMES P. WILLIS, M.D.
Radiology at Riata Vista Cir, Austin, TX

2006007, Apr 13, 2006

Oct 13, 2004

10/962596

James Willis - Austin TX, US

TOKYO ELECTRON LIMITED - Minato-ku

G05B 13/02, G06F 19/00

700108000, 703002000, 700031000, 700029000

A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models available from the processing system. In the module and method, an experiment is designed having a number of process runs for characterization of the selected process model. Process runs to collect data are executed on a processing tool coupled to the processing system. The actual process results from the process runs are measured. The process model is solved for coefficients of the process model.

7477960, Jan 13, 2009

Feb 16, 2005

11/058321

James E. Willis - Austin TX, US
Merritt Funk - Austin TX, US
Kevin Lally - Austin TX, US
Kevin Pinto - Austin TX, US
Masayuki Tomoyasu - Nirasaki, JP
Raymond Peterson - Manor TX, US
Radha Sundararajan - Dripping Springs TX, US

Tokyo Electron Limited - Tokyo

G06F 19/00

700121, 700 45, 700110, 700174

A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, providing the process recipe to a process module; executing the process recipe to produce a vector of measured dependent process parameters; calculating a difference between the vector of predicted dependent process parameters and the vector of measured dependent process parameters; comparing the difference to a threshold value; and declaring a fault condition when the difference is greater than the threshold value.

2004000, Jan 8, 2004

May 29, 2003

10/447228

James Willis - Lakeway TX, US

TOKYO ELECTRON LIMITED - Tokyo

G01N021/00

356/072000

The present invention provides for an improved data collection system comprising a measurement device and a controller, wherein the controller provides at least one algorithm for data handling, storage and manipulation. The present invention further provides for an improved method of data handling, storage and manipulation comprising the steps of: measuring a first set of data using a measurement device coupled to a process reactor, producing a first set of reduced data using a peak extraction algorithm executed on a controller coupled to the measurement device, wherein the first set of reduced data comprises a data volume equal to or less than a data volume of the first set of data. In an alternate embodiment of the present invention a first reduced data set and a second reduced data set can be determined, compared and correlated with a state of the plasma processing system. The state of the plasma processing system can include an endpoint condition or a fault condition.

5663997, Sep 2, 1997

Jan 27, 1995

8/379696

James E. Willis - Austin TX
Andrew L. Heilveil - Austin TX
Robert Dejaiffe - Dunkirk NY

Asoma Instruments, Inc. - Austin TX
Dunkirk International Glass and Ceramics Corporation - Dunkirk NY

G01N 23223

378 45

A method and apparatus for determining the composition of glass, and for sorting glass according to composition. Glass of unknown composition is irradiated and an x-ray fluorescence spectrum is detected from the glass. The detected x-ray fluorescence spectrum is then compared with a plurality of fluorescence spectra corresponding to glasses of known composition. The glass of unknown composition is then determined to correspond in composition to the glass of known composition having an x-ray fluorescence spectrum most closely matching the spectrum detected from the glass of unknown composition. The glass may then be sorted according to determined composition. In operation, a substantially continuous stream of glass pieces is irradiated and detected while the stream is moving. Once the composition of a piece of glass in the stream is determined, it is diverted into an appropriate container of like compositioned glass.

7437199, Oct 14, 2008

May 27, 2004

10/854424

James E Willis - Austin TX, US
Satoshi Harada - Nirasaki, JP
James E Klekotka - Mesa AZ, US

Tokyo Electron Limited

G05B 11/01, G05B 9/02

700 21, 700 79, 700 80

A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.

7213478, May 8, 2007

Feb 12, 2004

10/776452

Satoshi Harada - Nirasaki, JP
James E Willis - Austin TX, US
Kevin Andrew Chamness - Austin TX, US
Hieu A Lam - Richardson TX, US
Hongyu Yue - Plano TX, US
David Fatke - Austin TX, US

Tokyo Electron Limited - Tokyo

G01N 19/00

738659, 700121, 73 101

A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.