JAMES P WILLARD
Electrician at Abaco Harbour Ln, Round Rock, TX
License number
Texas 363044
Expiration Date
Mar 28, 2017
Category
Apprentice Electrician
Address
Address
17409 Abaco Harbour Ln, Round Rock, TX 78664
Phone
(512) 299-2624
Professional information
Phase Shifting Mask Having A Calibration Feature And Method Therefor
US Patent:
2007016, Jul 12, 2007
Filed:
Jan 10, 2006
Appl. No.:
11/328775
Inventors:
James Willard - Round Rock TX, US
Patsy Bergman - Austin TX, US
Patsy Bergman - Austin TX, US
International Classification:
G03C 5/00, G03F 9/00, G03F 1/00
US Classification:
430005000, 430022000, 430030000
Abstract:
A phase shift mask that corresponds to a layer of at least one semiconductor die has a substrate. A method thereof includes overlying a phase shifter film over the substrate. A permanent light calibration feature is positioned in close proximity to the at least one semiconductor die. The permanent light calibration feature has a predetermined area defined by an opening in the phase shifter film overlying the substrate. The predetermined area is within a range of area values and has a value that provides a light calibration value for use in testing with light for defects in the phase shift mask. An identification feature is positioned in close proximity to the permanent light calibration feature and is substantially larger than each of the permanent light calibration features. The identification feature provides a reference point to assist in locating a corresponding permanent light calibration feature.