Inventors:
Marc S. Weinberg - Needham MA, US
Anthony S. Kourepenis - Acton MA, US
William D. Sawyer - Lexington MA, US
Jeffrey T. Borenstein - Holliston MA, US
James H. Connelly - Weymouth MA, US
Amy E. Duwel - Cambridge MA, US
Christopher M. Lento - Boston MA, US
James R. Cousens - Hanson MA, US
Assignee:
The Charles Stark Draper Laboratory, Inc. - Cambridge MA
International Classification:
H01L 21/00
Abstract:
A method for reducing errors in a tuning fork gyroscope includes determining a first distance, g, between an upper sense plate and a proof mass and a second distance, g, between a lower sense plate and the proof mass. The method further includes applying a first voltage, V, to the upper sense plate and a second voltage, V, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.