Inventors:
Joseph R. Young - San Antonio TX
Benjamin Garcia Rodriguez - San Antonio TX
James R. Barry - San Antonio TX
Assignee:
Sony Corporation - Tokyo
Sony Electronics Inc. - Park Ridge NJ
International Classification:
G08B 2100
Abstract:
The invention provides an apparatus and method of monitoring a CVD process and providing an alarm signal normally used to terminate the CVD process in response to detecting the simultaneous occurrences of a command to initiate the CVD process, the initiation of the flow of a reactive process gas into the process chamber and the motion of a turret supporting the workpiece.