Inventors:
James L. Filson - Wexford PA
Philip M. Kemp - Jefferson Township PA
Stanley R. Kaars - Gibsonia PA
Assignee:
U.S. Filter Corporation - Palm Desert CA
International Classification:
C02F 900
US Classification:
210668, 210670, 210688, 210912
Abstract:
A novel process and apparatus are disclosed for cleaning wastewater containing metal ions in solution, hydrogen peroxide, and high solids, e. g. , greater than about 50 mg/l particulate solids. A carbon adsorption column removes hydrogen peroxide in the wastewater feed containing high solids. A ion exchange unit removes the metal ions from solution. The process and apparatus remove metal ions such as copper from a high solids byproduct polishing slurry from the chemical mechanical polishing (CMP) of integrated circuit microchips to form an environmentally clean wastewater discharge.