Inventors:
Lawrence E. Brown - Loveland CO
James L. Bauer - Loveland CO
Gerald W. Scheck - Loveland CO
Assignee:
Hewlett-Packard Company - Palo Alto CA
International Classification:
B44C 122, C23F 102, H01L 21312
Abstract:
A metallic foil is laminated to a transparent substrate with a photopolymerizable adhesive. An outer layer of photoresist is used in etching a pattern in the foil. The etched foil itself is then used as a resist in the complete removal of the uncovered portions of the adhesive, leaving the transparency of the revealed substrate material totally unimpaired. Finally, the remaining adhesive is hardened by polymerization resulting from exposure to ultraviolet light passed through the substrate from the unlaminated side.