Inventors:
Jonah Jacob - Brookline MA, US
Joseph A. Mangano - Arlington VA, US
James Moran - Charlestown MA, US
Alexander Bykanov - Belmont MA, US
Rodney Petr - Acton MA, US
Mordechai Rokni - Jerusalem, IL
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01J 35/00
Abstract:
A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.