JAMES B GREGG
Engineering in Methuen, MA
License number
Massachusetts 37792
Issued Date
Mar 10, 1994
Expiration Date
Jun 30, 2018
Type
Mechanical Engineer
Address
Address
Methuen, MA 01844
Organization information
See more information about JAMES B GREGG at bizstanding.comJames B Gregg
5 Barrview Cir, Methuen, MA 01844
Status:
Inactive
Industry:
Business Services at Non-Commercial Site, Nonclassifiable Establishments
Professional information
Vacuum System Cold Trap Filter
US Patent:
8450701, May 28, 2013
Filed:
Apr 19, 2011
Appl. No.:
13/089830
Inventors:
William P. Reynolds - Canton MA, US
James Gregg - Methuen MA, US
Denis Robitaille - Ipswich MA, US
William D. Lee - Newburyport MA, US
James Gregg - Methuen MA, US
Denis Robitaille - Ipswich MA, US
William D. Lee - Newburyport MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
G21K 5/04, B01D 8/00
US Classification:
25044111, 2504431, 2504923, 62 555, 62914, 417228, 417243
Abstract:
A cold trap filter and method is provided for filtering chemical species from a vacuum system of an ion implantation system. A canister is in fluid communication with an exhaust of a high vacuum pump and an intake of a roughing pump used for evacuating an ion source chamber. One or more paddles are positioned within the canister, wherein each paddle has a cooling line in fluid communication with a coolant source. The coolant source passes a coolant through the cooling line, thus cooling the one or more paddles to a predetermined temperature associated with a condensation or deposition point of the chemical species, therein condensing or depositing the chemical species on the paddles while not interfering with a vacuum capacity of the high vacuum and roughing pumps. The paddles can also be electrically biased to electrostatically attract the chemical species to the paddles in one or more biasing steps.