HAROLD R SHURTLEFF
Broker in Bourne, MA
License number
Massachusetts 75903
Issued Date
Jan 1, 1972
Expiration Date
Sep 16, 1995
Type
Broker
Address
Address
Bourne, MA 02532
Professional information
Apparatus And Method For Cleaning Wafers
US Patent:
4208760, Jun 24, 1980
Filed:
Dec 19, 1977
Appl. No.:
5/861989
Inventors:
Jeffrey L. Dexter - North Dartmouth MA
William E. Fairweather - Mattapoisett MA
Harold R. Shurtleff - Buzzards Bay MA
William E. Fairweather - Mattapoisett MA
Harold R. Shurtleff - Buzzards Bay MA
Assignee:
Huestis Machine Corp. - Bristol RI
International Classification:
A46B 1304
US Classification:
15302
Abstract:
Apparatus and method in which a number of thin, disc-like wafers are moved in an arcuate path while supported in a generally upright position. While so supported, the wafers are indexed between a plurality of cleaning stations which may include a scrub station, a scrub rinse station, a rinse station, and a dry station. In the scrub rinse and/or scrub station, the wafers are rotated while contacted on opposite surfaces thereof by a pair of rotating brushes disposed in a closed position, which brushes may be moved to an open position to accommodate movement of the wafers therebetween. Furthermore, a bracket of unique construction serially moves the wafers into the travel path. Means for introducing the wafers to the path and for removing them therefrom are further included.