HA NGUYEN
Pharmacy at Power Rd, Mesa, AZ
License number
Arizona 14653
Category
Pharmacy
Type
Pharmacist
Address
Address
2
1855 N Power Rd, Mesa, AZ 85205
1925 E Todd Dr, Tempe, AZ 85283
1925 E Todd Dr, Tempe, AZ 85283
Phone
(480) 281-2990
(480) 491-7341
(480) 491-7341
Professional information
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Method For Improved Surface Planarity In Selective Epitaxial Silicon
Method For Improved Surface Planarity In Selective Epitaxial Silicon
US Patent:
4786615, Nov 22, 1988
Filed:
Aug 31, 1987
Appl. No.:
7/092267
Inventors:
Hang M. Liaw - Scottsdale AZ
Ha T.-T. Nguyen - Mesa AZ
Ha T.-T. Nguyen - Mesa AZ
Assignee:
Motorola Inc. - Schaumburg IL
International Classification:
H01L 21205, H01L 2176
US Classification:
437 89
Abstract:
A method for growing selective epitaxial silicon by chemical vapor deposition resulting in a substantially planar surface by growing superimposed silicon layers at temperatures above and below a transition point.