Inventors:
Eashwer Kollata - Sunnyvale CA, US
Antoine Manens - Sunnyvale CA, US
Pierre Fontarensky - Sunnyvale CA, US
Gregory Lee - Dublin CA, US
Alain Duboust - Sunnyvale CA, US
International Classification:
C25D 21/12
Abstract:
Embodiments of the invention generally provide a method for electrochemically removing material from a substrate. In one embodiment, a method for electrochemically processing a substrate includes determining a process target for a substrate; electrochemically processing the substrate; determining a deviation between expected and actual process indicators while processing, and changing at least one process variable during processing in response to the variation.