Gilbert Harrington Ross
Engineers at Killarney, Burlington, VT
License number
Colorado 6697
Issued Date
Aug 28, 1965
Renew Date
May 31, 2003
Expiration Date
May 31, 2003
Type
Professional Engineer
Address
Address
139 Killarney Dr, Burlington, VT 05401
Professional information
See more information about Gilbert Harrington Ross at trustoria.com
Chemical-Mechanical Polishing Tool With End Point Measurement Station
Chemical-Mechanical Polishing Tool With End Point Measurement Station
US Patent:
5492594, Feb 20, 1996
Filed:
Sep 26, 1994
Appl. No.:
8/311807
Inventors:
Peter A. Burke - Austin TX
Eric H. Freeman - Underhill Center VT
Gilbert H. Ross - Burlington VT
Eric H. Freeman - Underhill Center VT
Gilbert H. Ross - Burlington VT
Assignee:
International Business Machines Corp. - Armonk NY
International Classification:
B24B 100, B24B 3700
US Classification:
216 86
Abstract:
This is a wafer polishing and planarizing tool in which there is incorporated a separate measuring station and means for moving the wafer and immersing the wafer into the measuring station without removing it from the polishing head. The wafer being treated is quickly, reliably and periodically checked over its entire surface to determine the thickness of any dielectric on its surface. The measuring station contains a plurality of measuring electrodes immersed in an electrolyte so that when the wafer to be measured is introduced into the station not only is the wafer surface cleaned of any slurry or other contaminants but simultaneously the measuring electrodes see a constant medium to provide multi-point thickness measurements across the entire wafer surface. Thus measurement variations due to pad or slurry conditions are eliminated.