Inventors:
Gary J. ROSEN - Manchester MA, US
Frank SINCLAIR - Quincy MA, US
Alexander SOSKOV - Danvers MA, US
James S. BUFF - Brookline NH, US
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:
B22D 46/00, B22D 21/00, G01B 7/06, B22D 2/00
Abstract:
A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.