Inventors:
Frank J. Ardezzone - Santa Clara CA 95052-0242
International Classification:
B25J 1500
US Classification:
2941193, 294 991, 294907, 414941, 901 36, 901 39
Abstract:
Presented is an end-effector for grasping integrated circuit wafers with a talon-like device that effectively grips an arcuate peripheral âfree zoneâ of the wafer-without effecting contact of the wafer in a manner to contaminate it. Structurally, in one aspect of the invention, the end-effector or talon-like device is formed by-confronting top and bottom plate members configured to form a âshellâ within which is displaceably mounted a member which, when selectively displaced in one direction by the imposition-of-an-appropriate force, opens a normally-closed gripping member for receiving the arcuate peripheral âfree zoneâ of the wafer and when selectively displaced in the opposite direction by the removal of the opening force tightly grips the arcuate peripheral âfree zoneâ of the wafer to releasably retain it attached to the end-effector, from which it may selectively be released by the imposition of force in an opening direction that opposes and overcomes the force that effects gripping of the wafer. An indicator may be provided to signal the proper positioning of the wafer in relation to the end-effector, and a control system may be provided to effect opening and closing operation of the arcuate talon-like clamp.