Inventors:
Ernest J. Hamilton - Meridian ID, US
Assignee:
Micron Technology, Inc. - Boise ID
International Classification:
B28D 1/04
Abstract:
An apparatus for positioning dicing saw blades at a fixed axial distance from one another independent of the thicknesses of the saw blades, where the saw blade thickness varies within a range. Flanges, spacers, and retention elements may be employed to achieve desired spacing of dicing saw blades in an assembly. At least one biasing element that is at least partially constrained about its outer radial periphery may be employed to achieve axial positional independence of each dicing saw blade with respect to other dicing saw blades of the assembly. Further, at least one retention feature may also be used to fix the position of the at least one biasing element in the assembly. Machining techniques may be used to form the components and features of the present invention.