Eric S Miller
Nursing at Fair Fax St, Colorado Springs, CO
License number
Colorado 510596
Issued Date
Sep 22, 2001
Renew Date
Feb 1, 2016
Expiration Date
Jan 31, 2017
Type
Certified Nurse Aide
Address
Address
322 Fairfax St, Colorado Springs, CO 80911
Professional information
Eric Miller
Location:
Colorado Springs, Colorado
Industry:
Information Technology and Services
Method Of Forming Shallow Trench Isolation In A Silicon Wafer
US Patent:
6537895, Mar 25, 2003
Filed:
Nov 14, 2000
Appl. No.:
09/713513
Inventors:
Eric R. Miller - Colorado Springs CO
Stephen R. Moon - Colorado Springs CO
Stephen R. Moon - Colorado Springs CO
Assignee:
Atmel Corporation - San Jose CA
International Classification:
H01L 2176
US Classification:
438427, 438438, 438700, 438973, 257521
Abstract:
A method of forming a shallow trench isolation region in a silicon wafer which results in the elimination of long range slip dislocations in the wafer and reduces leakage current across the isolation regions. Long shallow trenches are formed in a silicon wafer at a 45 degree angle to the ( ) plane of the wafer. This is achieved by moving the primary flat of the wafer to the ( ) plane prior to the formation of the trenches, which causes the bottom edges of the long trenches to intersect with several ( ) planes, so that stresses do not propagate along any one single ( ) plane. The trenches are then filled with an insulative material, such as oxide.