EDWARD J KING
Nursing at San Paulo Cir, Melbourne, FL
License number
Florida 1177601
Issued Date
Jan 19, 1995
Effective Date
Sep 14, 2007
Expiration Date
Jul 31, 2019
Category
Health Care
Type
Licensed Practical Nurse
Address
Address
213 San Paulo Cir, Melbourne, FL 32904
Professional information
Method For Selective Deposition Of Tungsten On Silicon
US Patent:
4595608, Jun 17, 1986
Filed:
Nov 9, 1984
Appl. No.:
6/669787
Inventors:
Edward M. King - Melbourne Beach FL
Kurt E. Gsteiger - Indialantic FL
Joseph S. Raby - W. Melbourne FL
Kurt E. Gsteiger - Indialantic FL
Joseph S. Raby - W. Melbourne FL
Assignee:
Harris Corporation - Melbourne FL
International Classification:
B05D 722, C23C 1608
US Classification:
427237
Abstract:
A metal is selectively chemically vapor deposited on a substrate through openings in a moisture adsorbing mask layer by maintaining moisture in the mask layer. Thick metal layers are formed by precharging the mask with moisture. Also a cleaned tube is prepared for selective deposition by operating the process with a bare substrate until the tube is coated. The selective deposition is then performed.