Inventors:
Daniel Cameron - San Carlos CA, US
Edward Yuill - Reno NV, US
Philip Cooper - Lodi CA, US
Christopher Rainer - Stockton CA, US
International Classification:
B23K015/00
Abstract:
A crucible cover is used to stop, cross contamination of material, in the electron beam gun assembly, for evaporation of material in a vacuum chamber. The interlocking crucible cover stops cross contamination of the evaporated material, the angle of the crucible cover is below the line of sight of the evaporated material, to limit material build up for contamination, and the crucible cover is water cooled for mechanical stability.