Douglas D Meyer
Electrician at Ter Rd, Tempe, AZ
License number
Colorado 871
Issued Date
Apr 8, 1968
Renew Date
Feb 28, 1999
Expiration Date
Feb 28, 1999
Type
Master Electrician
Address
Address
3422 S Terrace Rd, Tempe, AZ 85282
Professional information
Double-Dome Reactor For Semiconductor Processing
US Patent:
5108792, Apr 28, 1992
Filed:
Mar 9, 1990
Appl. No.:
7/491416
Inventors:
Roger N. Anderson - Santa Clara CA
John G. Martin - Cranford NJ
Douglas Meyer - Tempe AZ
Daniel West - Sunnyvale CA
Russell Bowman - San Jose CA
David V. Adams - San Jose CA
John G. Martin - Cranford NJ
Douglas Meyer - Tempe AZ
Daniel West - Sunnyvale CA
Russell Bowman - San Jose CA
David V. Adams - San Jose CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
C23C 1600
US Classification:
4272481
Abstract:
A thermal reactor for epitaxial deposition on a wafer comprises a double-dome vessel and dual heat sources. Each heat source comprises inner and outer circular arrays of infrared lamps. Circumferential heating uniformity is assured by the cylindrical symmetry of the vessel and the heating sources. Radial heating uniformity is provided by independent control of inner and outer heating arrays for both the top and bottom heat sources. The relative temperatures of wafer and susceptor are controlled by adjusting relative energies provided by the upper and lower heat sources so that backside migration. Reduced pressure operation is provided for by the convex top and bottom domes. Due to the provided control over transmitted energy distribution, a susceptor can have low thermal mass so that elevated temperature can be achieved more quickly and cooling can be facilitated as well. This improves throughput and reduces manufacturing costs per wafer. Reagent gas introduction can be axial or radial as desired.