Inventors:
Donald Richard Tshudy - Lancaster PA
Thomas William Edwards - Mount Joy PA
Assignee:
RCA Corporation - New York NY
International Classification:
H01L 21205, H01L 3114
Abstract:
An array of microcrystalline silicon pads for a vidicon target is selectively grown, by the hydrogen reduction of silicon tetrachloride, along surface portions of a silicon wafer exposed through openings in an overlying silicon dioxide layer. The method disclosed avoids the spurious irregular growth of silicon on the silicon dioxide layer between the adjacent silicon pads.