Inventors:
James E. Morgenson - Danville CA, US
Michael A. Bush - Hudson OH, US
Donald A. Smith - Cincinnati OH, US
Karel Stryczek - Boston Heights OH, US
Michael V. Wood - Buckeye AZ, US
Assignee:
Rockwell Automation Technologies, Inc. - Mayfield Heights OH
International Classification:
F06F 19/00
US Classification:
700103, 700 97, 700104, 700109
Abstract:
Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics process operates according to process conditions to output a product, which manufacturing component at least one of monitors and controls the process using modularized code. A rules engine component processes one or more rules in association with the modularized code to control the process conditions in realtime by balancing process efficiency criteria to arrive at an optimal result.