Deborah Z Gunderson
Land Surveyors in Salt Lake City, UT
License number
Utah 176314-9925
Issued Date
Oct 31, 1987
Expiration Date
Dec 31, 1999
Category
Engineer/Land Surveyor
Type
Engineer in Training - Obsolete
Address
Address
Salt Lake City, UT
Professional information
Diamond Film Deposition With A Microwave Plasma
US Patent:
5370912, Dec 6, 1994
Filed:
Jul 20, 1993
Appl. No.:
8/094908
Inventors:
Louis K. Bigelow - Salt Lake City UT
James T. Hoggins - Sandy UT
Deborah Gunderson - Salt Lake City UT
Cristan Ellison - Salt Lake City UT
James T. Hoggins - Sandy UT
Deborah Gunderson - Salt Lake City UT
Cristan Ellison - Salt Lake City UT
Assignee:
Norton Company - Worcester MA
International Classification:
B05D 306
US Classification:
427575
Abstract:
A method for depositing diamond film on a substrate utilizing a tuneable microwave cavity with an adjustable height and antenna and an electrically insulated chamber comprises the steps of decreasing the pressure within the chamber, creating a plasma including hydrogen gas within the chamber, tuning the cavity by varying its height and the depth of insertion of the antenna to minimize reflected power and properly position the plasma on the substrate, injecting a hydrocarbon gas into the chamber, and maintaining the plasma for a sufficient time for diamond film of the desired thickness to be deposited.