Inventors:
David T. Anderson - Vancouver WA
Assignee:
SEH America, Inc. - Vancouver WA
International Classification:
B24B 4106
Abstract:
A fluid deflection device for use in a work piece holder during a semiconductor wafer grinding process is disclosed. The fluid deflection device includes an annular, upstanding splash fence, and an attachment portion associated with the splash fence and configured to attach to the work piece holder, thereby to hold the splash fence in a position to inhibit fluid from flowing between rotatable and non-rotatable parts of the work piece holder.