Inventors:
David S. De Lorenzo - Olympia WA, US
Stephen W. Montgomery - Federal Way WA, US
Robert J. Fite - Olympia WA, US
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H05K007/20
US Classification:
361704, 165 802, 165185, 174 163, 361707, 361708, 361718, 361719, 361722, 428216, 428408
Abstract:
The invention relates to a structure of and a process of forming an integrated circuit package that utilizes a thermal interface material layer having an aligned array of carbon nanotubes affixed to a surface of the layer. The thermal interface material is diamond deposited by chemical vapor deposition. The carbon nanotubes are formed by a plasma discharge process on the surface of the CVDD and also may be formed on the surface of the die.