Inventors:
Ronald Everett Meyers - Columbia MD, US
David Lawrence Rosen - Rockville MD, US
International Classification:
H01J 65/06
Abstract:
A method and system for investigating properties of an object comprising: a transmitter, including a radiation source, the transmitter providing incident radiation having a plurality of predetermined polarization states; the incident radiation illuminating an object and thereby causing the object to emit photoemission; a receiver, receiving photoemission from the object when the object is illuminated by the incident radiation, the receiver including a detector, the detector providing photoemission intensity data; and signal processing circuitry, in electrical communication with the detector, the signal processing circuitry determining three-dimensional information relating to the object from the photoemission intensity data for each of the plurality of incident polarization states.