Inventors:
Daniel Francis - Oakland CA, US
Rashit Nabiev - East Palo Alto CA, US
Richard P. Ratowsky - Berkeley CA, US
David Bruce Young - Oakland CA, US
Sunil Thomas - Mountain View CA, US
Roman Dimitrov - San Jose CA, US
Assignee:
Finisar Corporation - Sunnyvale CA
International Classification:
H01L 21/00
US Classification:
438 91, 438 93, 438 94, 438 57
Abstract:
This disclosure is concerned with starved source diffusion methods for forming avalanche photodiodes are provided for controlling an edge effect. In one example, a method for manufacturing an avalanche photodiode includes forming an absorber layer and an avalanche layer over a substrate. Next, a patterned mask defining one or more openings is formed over a surface of the avalanche layer. Finally, a dopant is deposited over the patterned mask and the avalanche layer such that the dopant is blocked by the patterned mask but diffuses into the avalanche layer in areas where the patterned mask defines an opening. The patterned mask is configured such that the depth to which the dopant diffuses into the avalanche layer varies so as to form a sloped diffusion front in the avalanche layer.