DAVID C LEE
Pilots at Lk Dr, Danbury, CT
License number
Connecticut A4985976
Issued Date
Dec 2016
Expiration Date
Dec 2018
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
134 Lake Dr S #219, Danbury, CT 06812
Professional information
Faceplate Having Regions Of Differing Emissivity
US Patent:
2013028, Oct 31, 2013
Filed:
Apr 17, 2013
Appl. No.:
13/864823
Inventors:
WILLIAM A. HATHCOCK - Red Hook NY, US
DAVID R. LEE - Danbury CT, US
DAVID R. LEE - Danbury CT, US
International Classification:
C23C 16/455
US Classification:
118715, 137561 A
Abstract:
Gas distribution apparatus for use in substrate processing chambers are disclosed. In some embodiments, gas distribution apparatus may include a faceplate to distribute a gas to a substrate. The faceplate includes a first side that faces the substrate. A central region of the first side has a first surface finish and a peripheral region of the first side has a second surface finish different than the first. A plurality of gas distribution holes are disposed through the faceplate to allow the gas to pass through the faceplate to a volume disposed on the first side of the faceplate. A rabbet may be disposed along an outer periphery of the faceplate on the first side with a ring disposed in the rabbet and removably coupled to the faceplate to form the peripheral region. The ring has a second side having the second surface finish that faces the substrate during use.