Inventors:
David A. Soltz - San Jose CA, US
Ye Yang - Fremont CA, US
Mark C. Lin - San Jose CA, US
Laurence S. Horndon - Santa Clara CA, US
Edward G. Solomon - Menlo Park CA, US
Joseph A. Heanue - Palo Alto CA, US
John F. Heanue - Manchester MA, US
M. Nasser Ghodsi - Hamilton MA, US
Assignee:
KLA-Tencor Corporation - Milpitas CA
International Classification:
H01J 37/244
Abstract:
A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second element that receives the photons from the second end of the first element, converts the photons to electrons, and multiplies the electrons, where no additional element is disposed between the second end of the first element and the second element, except optionally at least one of a photon-conductive epoxy, a lens, and an optical coupling plate that touches both the second end of the first element and the second element.