Inventors:
L. Charles Hardy - St. Paul MN, US
Heather K. Kranz - North Oaks MN, US
Thomas E. Wood - Stillwater MN, US
David A. Kaisaki - Minneapolis MN, US
John J. Gagliardi - Hudson WI, US
John C. Clark - White Bear Lake MN, US
Patricia M. Savu - Maplewood MN, US
Philip G. Clark - Eden Prairie MN, US
Assignee:
3M Innovative Properties Company - St. Paul MN
International Classification:
C09K 13/00
US Classification:
252 791, 252 792, 252 793, 252 794, 438689, 438690, 438691, 438692
Abstract:
The disclosure pertains to compositions and methods for modifying or refining the surface of a wafer suited for semiconductor fabrication. The compositions include working liquids useful in modifying a surface of a wafer suited for fabrication of a semiconductor device. In some embodiments, the working liquids are aqueous solutions of initial components substantially free of loose abrasive particles, the components including water, a surfactant, and a pH buffer exhibiting at least one pKgreater than 7. In certain embodiments, the pH buffer includes a basic pH adjusting agent and an acidic complexing agent, and the working liquid exhibits a pH from about 7 to about 12. In further embodiments, the disclosure provides a fixed abrasive article comprising a surfactant suitable for modifying the surface of a wafer, and a method of making the fixed abrasive article. Additional embodiments describe methods that may be used to modify a wafer surface.