Inventors:
Edward Agranat - Weston MA, US
Matthew Bouche - Tyngsboro MA, US
Dennis Carew - Burlington MA, US
Nicholas Celia - Avon MA, US
Michael Chalsen - N. Billerica MA, US
Cyriac Devasia - Nashua NH, US
Brian Evans - Marshfield MA, US
David Greco - Saugus MA, US
Gheorghe Pascariu - Summer Hill, SG
Russell Wheeler - Concord MA, US
Assignee:
Newport Corporation - Irvine CA
International Classification:
H01L029/739
Abstract:
A flip chip assembly machine (FCAM) () includes a main gantry () and a substrate camera gantry () that are configured to operate independently of each other and, respectively, support a die () and a substrate camera () for alignment purposes. The FCAM further includes a fluxer () for applying flux to the die. A flip-to-flux pick and place subassembly () picks up a die and places it in flux () independently of the operation of the main gantry, which may perform another task during the flux dwell time. A substrate carrier conveyor () includes a walking beam () to rapidly accelerate and decelerate substrate carrier movement into and out of the FCAM.